Products
0102030405
Nitrogen Trifluoride NF3 Electronic Gas
Product Description
Nitrogen Trifluoride is an inorganic compound, chemical formula NF3, colorless gas at normal temperature and pressure, insoluble in water, is a strong oxidizing agent, is an excellent plasma etching gas in the microelectronics industry, and can also be used as a high-energy fuel.
Specification
Specification |
99.99% |
99.999% |
Carbon Tetrafluoride |
≤40ppmv |
≤20ppmv |
Nitrogen |
≤10ppmv |
≤50ppmv |
Oxygen+Argon |
≤5ppmv |
≤3ppmv |
Carbon Monoxide |
≤1ppmv |
≤1ppmv |
Carbon Dioxide |
≤3ppmv |
≤0.5ppmv |
Nitrous Oxide |
≤3ppmv |
≤1ppmv |
Sulfur Hexafluoride |
≤3ppmv |
≤2ppmv |
Moisture |
≤1ppmv |
≤1ppmv |
Express as HF |
≤1ppmv |
≤1ppmv |
Typical Application
① As an oxidant: It can be used as an oxidant for hydrogen fluoride lasers.
② As an etching agent: It can be used as an etching agent in the production of semiconductors, liquid crystals and thin film solar cells.
Package & Shipping
Product |
Nitrogen Trifluoride NF3 |
Packaging Size |
40Ltr Cylinder |
Filling Net Weight/Cyl |
20kgs |
QTY Loaded in 20'Container |
240 Cyls |
Total Net Weight |
4.8 Tons |
Cylinder Tare Weight |
52kgs |
Valve |
CGA330/DISS640 |