Amagesi kagesi
0102030405
I-Tungsten hexafluoride WF6
Incazelo
I-Tungsten hexafluoride iyinhlanganisela ye-inorganic enefomula yamakhemikhali i-WF6, igesi engenambala emazingeni okushisa asekamelweni nokucindezela, futhi encibilika kuzincibilikisi eziningi eziphilayo.
Okuqukethwe Komkhiqizo
| Ukucaciswa | 99.999% | ||
| CF4 |
| K | ≤5ppb |
| O2 |
| UMn | ≤10ppb |
| N2 | ＜1 ppm | Kakade | ≤5ppb |
| CO | ＜0.5ppm | Th | ≤0.1ppb |
| CO2 | ＜0.5ppm | Kwe | ≤10ppb |
| ISiF4 | ＜0.5ppm | Lokho | ≤10ppb |
| SF6 | ＜0.5ppm | IN | ≤0.05ppb |
| HF | ＜ppm | Zn | ≤10ppb |
| Al | ≤10ppb | Futhi | ≤10ppb |
| Njengoba | ≤10ppb | Pb | ≤10ppb |
| B | ≤10ppb | P | ≤2ppb |
| Lokho | ≤5ppb | Mg | ≤10ppb |
| Cd | ≤2ppb | Ku | ≤20ppb |
| Cr | ≤10ppb | Nge | ≤5ppb |
| Fe | ≤10ppb | Mo | ≤10ppb |
| Ukungcola okuphelele kwezinye izinsimbi | ≤500 | ||
Iphakheji & Ukuthumela
| Umkhiqizo | I-Tungsten hexafluoride WF6 | ||
| Usayizi Wephakheji | 10Ltr Isilinda | 50Ltr Isilinda | / |
| Ukugcwalisa Isisindo Esiphelele/Cyl | 15KGS | 50kgs | |
| I-QTY Ilayishwe ku-20'Container | 500Cyls | 200Cyls | |
| Isisindo se-Cylinder Tare | 14kgs | 55kgs | |
| Ivalvu | CGA638 | ||
Uhlelo lokusebenza olujwayelekile
I-Tungsten fluoride (WF6) ukuphela kwezinhlobo ze-tungsten fluoride ezinzile futhi ezikhiqizwa ezimbonini. Isetshenziswa kakhulu njengempahla eluhlaza yenqubo ye-tungsten metal chemical vapor deposition (CVD) embonini ye-elekthronikhi, kanti i-WSi2 eyenziwe ngayo ingasetshenziswa njengezinto zokufaka izintambo kumasekethe amakhulu ahlanganisiwe (LSI), futhi ingabuye isetshenziswe. isetshenziswa njengempahla eluhlaza yama-electrode e-semiconductor, ama-fluorinating agents, ama-polymerization catalysts nezinto ezibonakalayo. Izicelo ezingezona eze-elekthronikhi ze-WF6: I-Tungsten ingenziwa ibe nzima ukukhiqiza i-tungsten carbide ebusweni bensimbi ngobuchwepheshe be-CVD ukuze kuthuthukiswe izindawo ezingaphezulu zensimbi, futhi ingase isetshenziselwe ukwenza izingxenye ezithile ze-tungsten, njengamapayipi e-tungsten nezinsimbi.