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I-Nitrogen Trifluoride NF3 Electronic Gas

Imikhiqizo

Imikhiqizo Izigaba
Imikhiqizo efakiwe
I-Octafluorocyclobutane C4F8

I-Octafluorocyclobutane C4F8
I-Propylene C3H6 R1270

I-Propylene C3H6 R1270
I-Dimethyl ether C2H6O DME

I-Dimethyl ether C2H6O DME
I-Tungsten hexafluoride WF6

I-Tungsten hexafluoride WF6
ISULFURYL FLUORIDE SO2F2

ISULFURYL FLUORIDE SO2F2
I-Chloromethane CH3Cl R40

I-Chloromethane CH3Cl R40
I-NITROGEN DIOXIDE NO2

I-NITROGEN DIOXIDE NO2
Ingxube 20% Ethylene oxide / 80 % Carbon dioxide

Ingxube 20% Ethylene oxide / 80 % Carbon dioxide
I-Silane Emagesi Engxube Ye-nitrogen

I-Silane Emagesi Engxube Ye-nitrogen
Ingxube Yegesi Yokulinganisa Amagesi Amagesi Ajwayelekile

Ingxube Yegesi Yokulinganisa Amagesi Amagesi Ajwayelekile
0102030405
I-Nitrogen Trifluoride NF3 Electronic Gas
I-Nitrogen Trifluoride NF3 Electronic Gas
I-Nitrogen Trifluoride NF3 Electronic Gas
I-Nitrogen Trifluoride NF3 Electronic Gas
I-Nitrogen Trifluoride NF3 Electronic Gas
I-Nitrogen Trifluoride NF3 Electronic Gas

I-Nitrogen Trifluoride NF3 Electronic Gas

Ukucaciswa:

Inombolo ye-CAS: 7783-54-2

I-EINECS Inombolo: 232-007-1

Inombolo ye-UN: UN 2451

Ikilasi le-DOT: 2.2&5.1

Ubumsulwa: 99.99% -99.999%

Ukupakishwa Okujwayelekile: Amasilinda angama-40L/47L amasilinda/440L amasilinda

Isisindo sengqamuzana: 71.0019 g/mol

Ukuminyana: 2.96 kg/m³

Impahla Yekhemikhali: Igesi Engashi, I-Oxidizing Agent

IBanga Elijwayelekile: IBanga Lemboni, Ibanga Le-Electronic

    Xhumana nathi
    imininingwane yomkhiqizo

    Incazelo Yomkhiqizo

    I-Nitrogen Trifluoride iyinhlanganisela ye-inorganic, ifomula yamakhemikhali i-NF3, igesi engenambala emazingeni okushisa avamile nokucindezela, engancibiliki emanzini, iyi-oxidizing ejenti eqinile, iyigesi elihle kakhulu le-plasma etching embonini ye-microelectronics, futhi ingasetshenziswa njengamandla aphezulu. amafutha.

    Ukucaciswa

    Ukucaciswa

    99.99%

    99.999%

    I-Carbon Tetrafluoride

    ≤40ppmv

    ≤20ppmv

    I-nitrogen

    ≤10ppmv

    ≤50ppmv

    I-Oxygen+Argon

    ≤5ppmv

    ≤3ppmv

    I-Carbon monoxide

    ≤1ppmv

    ≤1ppmv

    I-Carbon Dioxide

    ≤3ppmv

    ≤0.5ppmv

    I-Nitrous oxide

    ≤3ppmv

    ≤1ppmv

    I-Sulfur Hexafluoride

    ≤3ppmv

    ≤2ppmv

    Umswakama

    ≤1ppmv

    ≤1ppmv

    Veza njenge-HF

    ≤1ppmv

    ≤1ppmv

    Uhlelo lokusebenza olujwayelekile

    ① Njenge-oxidant: Ingasetshenziswa njenge-oxidant yama-laser e-hydrogen fluoride.
    ② Njenge-etching agent: Ingasetshenziswa njenge-etching agent ekukhiqizeni ama-semiconductors, amakristalu awuketshezi namaseli elanga efilimu emincane.

    Iphakheji & Ukuthumela

    Umkhiqizo

    I-Nitrogen Trifluoride NF3

    Usayizi Wokupakisha

    40Ltr Isilinda

    Ukugcwalisa Isisindo Esiphelele/Cyl

    20kgs

    I-QTY Ilayishwe ku-20'Container

    240 Cyls

    I-Total Net Weight

    4.8 amathani

    I-Cylinder Tare Weight

    52kgs

    Ivalvu

    CGA330/DISS640