Kungani I-Semiconductor Giant Yandisa Ukusetshenziswa Kwe-High-purity Fluorine (F2 Mix)?

Ngokombiko we-SK Hynix ka-2024 Sustainability Report osanda kukhishwa, i-Hynix izongena esikhundleniigesi ye-nitrogen trifluorideesetshenziswa ezinqubweni zokuhlanza i-semiconductor enamagesi anamandla aphansi okufudumala kwembulunga (GWP) ahambisana nemvelo. Kubikwa ukuthi lezi zinqubo zisebenzisaingxube yegesi ye-fluorine ehlanzekile (i-F2 Mix).

Enqubweni yokuqopha yokukhiqizwa kwe-semiconductor, izakhiwo ziqoshwa ku-semiconductor. Lesi sinyathelo senzeka kulokho okubizwa ngokuthi i-etcher. Impahla eqoshiwe iphinde ibeke ezindongeni zethuluzi lokunamathisela, ngakho-ke inqubo ehlukile iyadingeka ukuhlanza ithuluzi. Ezimweni eziningi, ihlanzwa ngeNF3, kodwa kukhona ama-etchers emakethe asebenzisa aingxube yegesi ye-F2/N2 ehlanzekile kakhulu.

Lezi zingxube zegesi zisusa izinhlanganisela ze-SiO2 ne-Si3N4 ngendlela evumelana nemvelo futhi zingashintshaNF3njengegesi yokuhlanza. Ngaphezu kwalokho, i-GWP (Global Warming Potential) yengxube ye-F2/N2 inguziro uma iqhathaniswa ne-NF3's 17900. Ingxube yegesi ye-F2/N2 nayo ingangena esikhundleni.amanye amagesi okuhlanza njenge-CF4 noma i-C2F6.

I-SOLVAY isungule futhi yanikeza ilungelo lobunikazi izingxube zegesi ye-fluorine ehlukile. Njengegesi ehambisana nemvelo yezinqubo zokuhlanza i-CVD, i-Solvaclean® isebenzisa igesi encane kakhulu ngomjikelezo ngamunye futhi ngenxa yalokho isebenza kahle kakhulu, naphezu kokuba nenani elifanayo lokuhlanza uma liqhathaniswa nezinye izindlela. Uma i-F2 ikhishelwa endaweni ezungezile, ibola ngokushesha ibe yi-HF. I-HF imuncwa umswakama bese ikhukhulwa yimvula. Akukho lutho olusele emkhathini. Imikhiqizo ye-Solvaclean® inoziro GWP (Global Warming Potential).

Kubikwa ukuthi abakhiqizi bama-chip abafana ne-Hynix ne-Samsung bafuna ukwandisa ukusetshenziswa kwe-high-purity fluorine mixed gas (F2 Mix).

Enye igesi esetshenziswa ngokwandayo yii-hydrogen fluoride (HF), esetshenziswa emishinini ye-cryogenic etching. I-HF ine-GWP engu-1 noma ngaphansi, ephansi kakhulu kunamagesi e-fluorocarbon ayesetshenziswa esikhathini esidlule ekushoniseni imbobo yesiteshi se-NAND.I-fluorocarbon family gases carbon tetrafluoride (CF4)kanye ne-octafluorocyclobutane (C4F8) inama-GWP angu-6030 no-9540, ngokulandelanayo.

Ukushintsha okukhulunywe ngakho ngenhla ekusetshenzisweni kwegesi kulindeleke ukuthi kube nomthelela ekusebenzeni kokuhlobeneizinkampani zegesi ezikhethekile ze-elekthronikhi.