Awọn gaasi itanna
0102030405
Tungsten hexafluoride WF6
Apejuwe
Tungsten hexafluoride jẹ agbo aibikita pẹlu agbekalẹ kemikali WF6, gaasi ti ko ni awọ ni iwọn otutu yara ati titẹ, ati tiotuka ninu ọpọlọpọ awọn olomi Organic.
Akoonu ọja
| Sipesifikesonu | 99.999% | ||
| CF4 |
| K | ≤5ppb |
| O2 |
| Mn | ≤10ppb |
| N2 | .1ppm | Tẹlẹ | ≤5ppb |
| CO | .0.5ppm | Th | ≤0.1ppb |
| CO2 | .0.5ppm | Ti | ≤10ppb |
| SiF4 | .0.5ppm | Iyẹn | ≤10ppb |
| SF6 | .0.5ppm | IN | ≤0.05ppb |
| HF | .ppm | Zn | ≤10ppb |
| Al | ≤10ppb | Ati | ≤10ppb |
| Bi | ≤10ppb | Pb | ≤10ppb |
| B | ≤10ppb | P | ≤2ppb |
| Iyẹn | ≤5ppb | Mg | ≤10ppb |
| Cd | ≤2ppb | Ni | ≤20ppb |
| Kr | ≤10ppb | Pẹlu | ≤5ppb |
| Fe | ≤10ppb | Mo | ≤10ppb |
| Lapapọ impurities ti miiran irin | ≤500 | ||
Package & Gbigbe
| Ọja | Tungsten hexafluoride WF6 | ||
| Package Iwon | 10Ltr Silinda | 50Ltr Silinda | / |
| Àgbáye Net iwuwo / Cyl | 15KGS | 50kgs | |
| QTY ti kojọpọ ni 20'Apoti | 500Cyls | 200Cyls | |
| Silinda Tare iwuwo | 14kgs | 55kgs | |
| Àtọwọdá | CGA638 | ||
Ohun elo Aṣoju
Tungsten fluoride (WF6) jẹ iduroṣinṣin nikan ati ti iṣelọpọ tungsten fluoride ti iṣelọpọ. O ti wa ni o kun bi awọn kan aise ohun elo fun tungsten irin kemikali oru iwadi oro (CVD) ilana ninu awọn Electronics ile ise, ati awọn WSi2 ṣe lati o le ṣee lo bi awọn kan onirin ohun elo ni ti o tobi-asekale ese iyika (LSI), ati ki o le tun jẹ. ti a lo bi ohun elo aise fun awọn amọna semikondokito, awọn aṣoju fluorinating, awọn ayase polymerization ati awọn ohun elo opiti. Awọn ohun elo ti kii-itanna ti WF6: Tungsten le jẹ ki o nira lati ṣe agbejade tungsten carbide lori oju irin nipasẹ imọ-ẹrọ CVD lati mu awọn ohun-ini dada ti irin, ati pe o tun le ṣee lo lati ṣe awọn paati tungsten kan, gẹgẹbi awọn paipu tungsten ati awọn crucibles.