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Tungsten hexafluoride WF6
Inkcazo
I-Tungsten hexafluoride yikhompawundi ye-inorganic kunye ne-chemical formula WF6, igesi engenambala kwiqondo lobushushu begumbi kunye noxinzelelo, kwaye inyibilika kwizinto ezininzi ze-organic solvents.
Umxholo weMveliso
| Inkcazo | 99.999% | ||
| CF4 |
| K | ≤5ppb |
| O2 |
| Mnu | ≤10ppb |
| N2 | ＜1ppm | Sele | ≤5ppb |
| CO | ＜0.5ppm | Th | ≤0.1ppb |
| CO2 | ＜0.5ppm | Kwe | ≤10ppb |
| SiF4 | ＜0.5ppm | Oko | ≤10ppb |
| SF6 | ＜0.5ppm | IN | ≤0.05ppb |
| HF | ＜ppm | Zn | ≤10ppb |
| Al | ≤10ppb | Kwaye | ≤10ppb |
| Njengoko | ≤10ppb | Pb | ≤10ppb |
| B | ≤10ppb | P | ≤2ppb |
| Oko | ≤5ppb | Mg | ≤10ppb |
| Cd | ≤2ppb | Kwi | ≤20ppb |
| Cr | ≤10ppb | Nge | ≤5ppb |
| Fe | ≤10ppb | Mo | ≤10ppb |
| Ukungcola okupheleleyo kwezinye isinyithi | ≤500 | ||
Ukupakishwa kunye nokuThunyelwa
| Imveliso | Tungsten hexafluoride WF6 | ||
| Ubungakanani bepakethi | 10Ltr Isilinda | 50Ltr Isilinda | / |
| Ukuzalisa ubunzima beNet / Cyl | 15KGS | 50kgs | |
| I-QTY ilayishwe kwi-20'Container | 500Cyls | 200Cyls | |
| Cylinder Tare Weight | 14kgs | 55kgs | |
| Ivalve | CGA638 | ||
Usetyenziso oluqhelekileyo
I-Tungsten fluoride (WF6) lolona hlobo lodwa oluzinzileyo noluveliswa kwimizi-mveliso ye-tungsten fluoride. Isetyenziswa ikakhulu njengento ekrwada yenkqubo ye-tungsten metal chemical vapor deposition (CVD) kushishino lwe-electronics, kwaye i-WSi2 eyenziwe ngayo ingasetyenziswa njengesixhobo socingo kwiisekethe ezinkulu ezidityanisiweyo (LSI), kwaye inokuba nayo. isetyenziswe njengento ekrwada yee-electrodes ze-semiconductor, i-fluorinating agents, i-polymerization catalysts kunye nezinto ezibonakalayo. Izicelo ezingezizo ze-elektroniki ze-WF6: I-Tungsten ingenziwa nzima ukuvelisa i-tungsten carbide phezu kobuso betsimbi nge-CVD iteknoloji yokuphucula izakhiwo zentsimbi, kwaye ingasetyenziselwa ukuvelisa izixhobo ezithile ze-tungsten, ezifana nemibhobho ye-tungsten kunye ne-crucibles.