Kasa faaeletonika
0102030405
Tungsten hexafluoride WF6
Fa'amatalaga
Tungsten hexafluoride o se mea faʻapitoa faʻatasi ma le fua faʻainisinia WF6, o se kasa e leai ni lanu i le vevela o le potu ma le mamafa, ma solu i le tele o solvents organic.
O mea o lo'o iai
| Fa'amatalaga | 99.999% | ||
| CF4 |
| K | ≤5ppb |
| O2 |
| Mn | ≤10ppb |
| N2 | ＜1ppm | Ua uma | ≤5ppb |
| CO | ＜0.5ppm | Th | ≤0.1ppb |
| CO2 | ＜0.5ppm | O | ≤10ppb |
| SiF4 | ＜0.5ppm | lena | ≤10ppb |
| SF6 | ＜0.5ppm | IN | ≤0.05ppb |
| HF | ＜ppm | Zn | ≤10ppb |
| Al | ≤10ppb | Ma | ≤10ppb |
| E pei o | ≤10ppb | Pb | ≤10ppb |
| B | ≤10ppb | P | ≤2ppb |
| lena | ≤5ppb | Mg | ≤10ppb |
| Cd | ≤2ppb | I totonu | ≤20ppb |
| Cr | ≤10ppb | Faatasi ai ma | ≤5ppb |
| Fe | ≤10ppb | Mo | ≤10ppb |
| Aofa'i le mama o isi uamea | ≤500 | ||
afifi & uta
| Oloa | Tungsten hexafluoride WF6 | ||
| Tele o le afifi | 10Ltr Cylinder | 50Ltr Cylinder | / |
| Fa'atumuga Net Weight/Cyl | 15KGS | 50kgs | |
| QTY utaina ile 20'Container | 500Cyls | 200Cyls | |
| Mamafa Tare Silinder | 14kgs | 55kgs | |
| Valve | CGA638 | ||
Fa'aoga masani
Tungsten fluoride (WF6) e na o le pau lea o le fale mautu ma gaosi oloa tungsten fluoride ituaiga. E masani ona faʻaaogaina e avea o se mea mataʻutia mo le tungsten metal chemical vapor deposition (CVD) i totonu o mea tau eletise, ma o le WSi2 na faia mai ai e mafai ona faʻaaogaina e avea o se mea faʻapipiʻi i le tele-scale integrated circuits (LSI), ma e mafai foi ona fa'aaogaina e fai ma mea mata mo electrodes semiconductor, fluorinating sooupu, polymerization catalysts ma mea opitika. Fa'aoga e le fa'aeletonika o le WF6: Tungsten e mafai ona fa'amalosi e maua ai le tungsten carbide i luga o le sila e ala i le CVD technology e fa'aleleia atili ai le tulaga o le sila, ma e mafai fo'i ona fa'aoga e gaosia ai nisi vaega tungsten, e pei o paipa tungsten ma crucibles.