Imyuka ya elegitoroniki
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Tungsten hexafluoride WF6
Ibisobanuro
Tungsten hexafluoride ni ifumbire mvaruganda hamwe na formula ya chimique WF6, gaze itagira ibara mubushyuhe bwicyumba nigitutu, kandi igashonga mumashanyarazi menshi.
Ibirimo
| Ibisobanuro | 99,999% | ||
| CF4 |
| K. | ≤5ppb |
| O2 |
| Mn | ≤10ppb |
| N2 | ＜1ppm | Bimaze | ≤5ppb |
| CO | ＜0.5ppm | Th | ≤0.1ppb |
| CO2 | ＜0.5ppm | Bya | ≤10ppb |
| SiF4 | ＜0.5ppm | Ibyo | ≤10ppb |
| SF6 | ＜0.5ppm | IN | ≤0.05ppb |
| HF | ＜ppm | Zn | ≤10ppb |
| Al | ≤10ppb | Kandi | ≤10ppb |
| Nk | ≤10ppb | Pb | ≤10ppb |
| B. | ≤10ppb | P. | ≤2ppb |
| Ibyo | ≤5ppb | Mg | ≤10ppb |
| Cd | ≤2ppb | Muri | ≤20ppb |
| Cr | ≤10ppb | Hamwe na | ≤5ppb |
| Fe | ≤10ppb | Mo. | ≤10ppb |
| Umwanda wose wibindi byuma | 00500 | ||
Gupakira & Kohereza
| Ibicuruzwa | Tungsten hexafluoride WF6 | ||
| Ingano yububiko | 10Ltr Cylinder | 50Ltr Cylinder | / |
| Kuzuza ibiro byuzuye / Cyl | 15KGS | 50kgs | |
| QTY Yapakiwe muri 20'Container | 500Cyls | 200Cyls | |
| Uburemere bwa Cylinder | 14kgs | 55kgs | |
| Agaciro | CGA638 | ||
Porogaramu isanzwe
Tungsten fluoride (WF6) niyo yonyine itunganijwe kandi ikorwa ninganda za tungsten fluoride. Ikoreshwa cyane cyane nkibikoresho fatizo bya tungsten ibyuma biva mu bimera (CVD) mu nganda za elegitoroniki, kandi WSi2 ikozwe muri yo irashobora gukoreshwa nkibikoresho bifata insinga mu miyoboro minini ihuriweho (LSI), kandi birashobora no kuba ikoreshwa nkibikoresho fatizo bya electrode ya semiconductor, imiti ya fluor, catalizike ya polymerisiyasi nibikoresho bya optique. Gukoresha ibikoresho bya elegitoroniki bya WF6: Tungsten irashobora gukorwa cyane kugirango ikore karbide ya tungsten hejuru yicyuma hakoreshejwe ikoranabuhanga rya CVD kugirango itezimbere imiterere yicyuma, kandi irashobora no gukoreshwa mugukora ibice bimwe na bimwe bya tungsten, nk'imiyoboro ya tungsten na crucibles.