Nitrogen Trifluoride NF3 Electronic Gas
Mafotokozedwe Akatundu
Nayitrogeni Trifluoride ndi organic pawiri, mankhwala chilinganizo NF3, colorless mpweya kutentha wabwinobwino ndi kuthamanga, osasungunuka m'madzi, ndi amphamvu oxidizing wothandizila, ndi wabwino kwambiri plasma etching mpweya mu makampani microelectronics, ndipo angagwiritsidwe ntchito ngati mkulu-mphamvu. mafuta.
Kufotokozera
Kufotokozera | 99.99% | 99.999% |
Mpweya wa Tetrafluoride | ≤40ppmv | ≤20ppmv |
Nayitrogeni | ≤10ppmv | ≤50ppmv |
Oxygen + Argon | ≤5ppmv | ≤3ppmv |
Mpweya wa Monoxide | ≤1ppmv | ≤1ppmv |
Mpweya wa carbon dioxide | ≤3ppmv | ≤0.5ppmv |
Nitrous oxide | ≤3ppmv | ≤1ppmv |
Sulfur Hexafluoride | ≤3ppmv | ≤2ppmv |
Chinyezi | ≤1ppmv | ≤1ppmv |
Onetsani ngati HF | ≤1ppmv | ≤1ppmv |
Ntchito Yofananira
Phukusi & Kutumiza
Zogulitsa | Nayitrogeni Trifluoride NF3 |
Packaging Size | 40Ltr Cylinder |
Kudzaza Net Weight/Cyl | 20kg pa |
QTY Yokwezedwa mu 20'Container | 240 Zolemba |
Total Net Weight | 4.8 tani |
Kulemera kwa Cylinder Tare | 52kg pa |
Vavu | CGA330/DISS640 |