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Tungsten hexafluoride WF6
Whakaahuatanga
Ko te hexafluoride Tungsten he pūhui pararopi me te tātai matū WF6, he hau karekau i te pāmahana rūma me te pēhanga, ka whakarewahia i roto i te nuinga o nga whakarewa pararopi.
Ihirangi Hua
| Whakatakotoranga | 99.999% | ||
| CF4 |
| K | ≤5ppb |
| O2 |
| Mn | ≤10ppb |
| N2 | ＜1ppm | Kua | ≤5ppb |
| CO | ＜0.5ppm | Th | ≤0.1ppb |
| CO2 | ＜0.5ppm | O | ≤10ppb |
| SiF4 | ＜0.5ppm | Ko tera | ≤10ppb |
| SF6 | ＜0.5ppm | IN | ≤0.05ppb |
| HF | ＜ppm | Zn | ≤10ppb |
| Ko Al | ≤10ppb | Na | ≤10ppb |
| As | ≤10ppb | Pb | ≤10ppb |
| B | ≤10ppb | P | ≤2ppb |
| Ko tera | ≤5ppb | Mg | ≤10ppb |
| Cd | ≤2ppb | I roto | ≤20ppb |
| Cr | ≤10ppb | Me | ≤5ppb |
| Fe | ≤10ppb | Mo | ≤10ppb |
| Ko nga poke katoa o etahi atu whakarewa | ≤500 | ||
Mōkī me te tuku
| Hua | Tungsten hexafluoride WF6 | ||
| Rahi mokete | 10Ltr Potakaro | 50Ltr Potakaro | / |
| Whakakī Taumaha Kupenga/Cyl | 15KGS | 50kg | |
| QTY I utaina ki te 20'Ipu | 500Cyls | 200Cyls | |
| Taumaha Tare Porotakaro | 14kg | 55kg | |
| Takirere | CGA638 | ||
Taupānga Angamaheni
Ko te Tungsten fluoride (WF6) anake te momo tungsten fluoride e mau ana me te hanga ahumahi. Ko te nuinga o te waa e whakamahia ana hei rauemi mata mo te tungsten metal chemical vapor deposition (CVD) i roto i te ahumahi hikohiko, a ko te WSi2 i hangaia mai i a ia ka taea te whakamahi hei taputapu waea i roto i nga waahanga whakauru nui (LSI), ka taea hoki te mahi. whakamahia hei rauemi mata mo nga hiko hikohiko, nga kaihoko fluorinating, polymerization catalysts me nga taonga whatu. Ko nga tono hiko-kore o te WF6: Ka taea te hanga i te tungsten carbide i runga i te mata o te maitai ma te hangarau CVD hei whakapai ake i nga ahuatanga o te mata o te rino, ka taea hoki te whakamahi ki te hanga i etahi waahanga tungsten, penei i nga paipa tungsten me nga crucibles.