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Octafluorocyclobutane C4F8
Whakaahuatanga
Ko te Octafluorocyclobutane (C-318) RC318 he perfluorocycloalkane tino whai kiko me te matū, na te mea he kore-paitini a RC318 me te kore uara ODP, kaore he painga kino ki te paparanga ozone.
Ihirangi Hua
Whakatakotoranga | 99.999% |
hauota | ≤2ppm |
Oxygen+Argon | ≤1ppm |
Waro Monoxide | ≤0.5ppm |
hauwai | ≤0.5ppm |
Te hauhā | ≤0.5ppm |
Mewaro | ≤0.5ppm |
OHC | ≤2ppm |
makuku | ≤3ppm |
Kawakawa hei HF | ≤0.1ppm |
Mōkī me te tuku
Hua | Mewaro CH4 R50 Hau | ||
Rahi mokete | 47Ltr Potakaro | 926Ltr Potakaro | / |
Whakakī Taumaha Kupenga/Cyl | 45kg | 1000kg | |
QTY I utaina ki te 20'Ipu | 250 Kiriata | 14Nga poro | |
Taumaha Tare Porotakaro | 50Kgs | 512Kgs | |
Takirere | DISS716 |
Taupānga Angamaheni
He maha nga tono a Octafluorocyclobutane, a kua whakamahia nuitia hei whakamahana i nga tau tata nei ki te whakakapi i nga chlorofluorocarbons kua rahuitia, ka whakamahia ano hoki i roto i nga papaa whakamaarama hau, nga whakarewa, nga rehu, nga pupuhi pupuhi, nga etchants ara iahiko nui, te mahi papu wera. wai, me nga rauemi mata mo te hanga o nga monomers C2F4 me C3F6. Ka whakamahia te octafluorocyclobutane teitei (i runga ake i te 5N) i roto i te LSI etchants me te horoi horoi.