Hua
0102030405
Nitrogen Trifluoride NF3 Hiko Hau
Whakaahuatanga Hua
Ko te Nitrogen Trifluoride he pūhui pararopi, tātai matū NF3, hau kārekau i te pāmahana me te pēhanga noa, karekau e rewa i te wai, he kaikawe whakarorohiko kaha, he hau etching plasma pai i roto i te ahumahi microelectronics, ka taea hoki te whakamahi hei hiko-kaha. wahie.
Whakatakotoranga
Whakatakotoranga | 99.99% | 99.999% |
Carbon Tetrafluoride | ≤40ppmv | ≤20ppmv |
hauota | ≤10ppmv | ≤50ppmv |
Oxygen+Argon | ≤5ppmv | ≤3ppmv |
Waro Monoxide | ≤1ppmv | ≤1ppmv |
Te hauhā | ≤3ppmv | ≤0.5ppmv |
Haokawa Nitrous | ≤3ppmv | ≤1ppmv |
Hexafluoride whanariki | ≤3ppmv | ≤2ppmv |
makuku | ≤1ppmv | ≤1ppmv |
Whakaatuhia hei HF | ≤1ppmv | ≤1ppmv |
Taupānga Angamaheni
① Hei hāora: Ka taea te whakamahi hei hāora mō ngā taiaho pūkōwhai hauwai.
② Hei kaihoko tarai: Ka taea te whakamahi hei kaihoko tarai i roto i te hanga semiconductors, tioata wai me nga pūtau solar kiriata angiangi.
Mōkī me te tuku
Hua | Nitrogen Trifluoride NF3 |
Rahi Packaging | 40Ltr Potakaro |
Whakakī Taumaha Kupenga/Cyl | 20kg |
QTY I utaina ki te 20'Ipu | 240 Kiriata |
Taumaha Kupenga Tapeke | 4.8 Tane |
Taumaha Tare Cylinder | 52kg |
Takirere | CGA330/DISS640 |