Nitrogen Trifluoride NF3 Electronic Gas
depictio producti
NITROGENIUM Trifluoride compositum est inorganicum, formula chemica NF3, gasi hyalinae in temperatura et pressione normali, insolubilis in aqua, est agens validum oxidizing, est optimum plasma etching gas in microelectronics industriae, ac etiam ut summus industria adhiberi potest. cibus.
Specification
Specification | 99.99% | 99.999% |
Carbon Tetrafluoride | ≤40ppmv | ≤20ppmv |
Nitrogen | ≤10ppmv | ≤50ppmv |
Oxygeni+Argon | ≤5ppmv | ≤3ppmv |
Carbo carbonis monoxide | ≤1ppmv | ≤1ppmv |
Carbon Dioxide | ≤3ppmv | ≤0.5ppmv |
Oxideum nitrum | ≤3ppmv | ≤1ppmv |
Sulphur Hexafluoride | ≤3ppmv | ≤2ppmv |
umor | ≤1ppmv | ≤1ppmv |
Express ut HF * | ≤1ppmv | ≤1ppmv |
Typicam Applicationem
Sarcina & Shipping
Productum | Nitrogen Trifluoride NF3 |
Packaging Location | 40Ltr Cylindri |
Implens Net pondus / Cyl | 20kgs |
QTY Loaded in 20'Container | 240 Cyls |
Totalis pondus Net | 4.8 Tons |
Cylindrus Tare pondus | 52kgs |
Valvae | CGA330/DISS640 |