Igwe ọkụ eletrik
0102030405
Tungsten hexafluoride WF6
Nkọwa
Tungsten hexafluoride bụ ngwakọta inorganic nwere usoro kemịkalụ WF6, gas na-enweghị ụcha n'ime ụlọ okpomọkụ na nrụgide, yana soluble n'ọtụtụ ihe mgbaze organic.
Ọdịnaya ngwaahịa
| Nkọwapụta | 99.999% | ||
| CF4 |
| K | ≤5pb |
| O2 |
| Mn | ≤10ppb |
| N2 | .1ppm | Ugbua | ≤5pb |
| CO | .0,5ppm | Th | ≤0.1 pb |
| CO2 | .0,5ppm | Nke | ≤10ppb |
| SiF4 | .0,5ppm | Nke ahụ | ≤10ppb |
| SF6 | .0,5ppm | N'ime | ≤0.05ppb |
| HF | .ppm | Zn | ≤10ppb |
| Al | ≤10ppb | Na | ≤10ppb |
| Dị ka | ≤10ppb | Pb | ≤10ppb |
| B | ≤10ppb | P | ≤2pb |
| Nke ahụ | ≤5pb | Mg | ≤10ppb |
| Cd | ≤2pb | N'ime | ≤20ppb |
| Cr | ≤10ppb | Ya na | ≤5pb |
| Fe | ≤10ppb | Mo | ≤10ppb |
| Mkpokọta adịghị ọcha nke ọla ndị ọzọ | ≤500 | ||
Ngwugwu & Mbupu
| Ngwaahịa | Tungsten hexafluoride WF6 | ||
| Nha ngwugwu | 10 lita cylinder | 50 lita cylinder | / |
| Na-ejuputa Net arọ/Cyl | 15KGS | 50kg | |
| Ebuuru QTY n'ime akpa 20' | 500 Cyl | 200 Cyl | |
| Cylinder Tare Ibu | 14kgs | 55kg | |
| Valve | CGA638 | ||
Ngwa a na-ahụkarị
Tungsten fluoride (WF6) bụ naanị tungsten fluoride dị iche iche kwụsiri ike na nke arụpụtara arụpụtara. A na-ejikarị ya eme ihe dị ka akụrụngwa maka tungsten metal chemical vapor deposition (CVD) na ụlọ ọrụ eletrọnịkị, na WSi2 mere site na ya nwere ike iji dị ka wiring ihe na nnukwu-ọnụ ọgụgụ integrated sekit (LSI), na nwekwara ike ịbụ. eji dị ka akụrụngwa maka semiconductor electrodes, fluorinating agents, polymerization catalysts na ngwa anya ihe. Ngwa ndị na-abụghị nke elektrọnik nke WF6: Tungsten nwere ike ime ka ọ sie ike imepụta tungsten carbide n'elu igwe site na teknụzụ CVD iji meziwanye ihe ndị dị n'elu igwe, a pụkwara iji ya rụọ ọrụ ụfọdụ tungsten, dị ka tungsten pipes na crucibles.