Kedu ihe kpatara Semiconductor Giant ji gbasaa iji Fluorine dị ọcha (F2 Mix)?

Dabere na SK Hynix's 2024 Sustainability Report ewepụtara na nso nso a, Hynix ga-anọchi nke ahụ.nitrogen trifluoride gasA na-eji ya na usoro nhicha nke semiconductor nwere ike ikuku okpomoku zuru ụwa ọnụ dị ala (GWP). A na-akọ na usoro ndị a na-ejiNgwakọta gas fluorine dị ọcha (F2 Mix).

N'ime usoro etching nke mmepụta semiconductor, a na-etinye ihe owuwu n'ime semiconductor. Nzọụkwụ a na-ewere ọnọdụ na ebe a na-akpọ etcher. Ihe etched na-etinyekwa na mgbidi nke ngwá ọrụ etching, ya mere a chọrọ usoro dị iche iche iji kpochapụ ngwá ọrụ ahụ. Ọtụtụ mgbe, a na-eji ya na-ehicha yaNF3, ma e nwere etchers na ahịa na-eji aNgwakọta gas F2/N2 dị ọcha.

Ngwakọta gas ndị a na-ewepụ ogige SiO2 na Si3N4 n'ụzọ enyi na gburugburu ebe obibi ma nwee ike dochie yaNF3dị ka a ihicha gas. Na mgbakwunye, GWP (Potential Warming Global) nke ngwakọta F2/N2 bụ efu ma e jiri ya tụnyere NF3's 17900. Ngwakọta gas F2/N2 nwekwara ike dochie anya.gas ndị ọzọ na-ehicha ihe dị ka CF4 ma ọ bụ C2F6.

SOLVAY ewepụtala ma nweta ikike ngwakọta gas fluorine dị iche iche. Dị ka gas na-emekọrịta ihe na gburugburu ebe obibi maka usoro nhicha CVD, Solvaclean® na-eji obere gas na-arụ ọrụ n'otu oge ma na-arụ ọrụ nke ọma karị, n'agbanyeghị na-enwe ụdị nhicha dị otú ahụ ma e jiri ya tụnyere ndị ọzọ. Ọ bụrụ na a tọhapụrụ F2 na gburugburu ebe obibi, ọ na-emebi ozugbo na HF. Mmiri na-amịkọrọ HF, mmiri ozuzo na-asachapụkwa ya. Ọ dịghị ihe fọdụrụ na ikuku. Ngwaahịa Solvaclean® nwere GWP efu (nwere ike ikpo ọkụ zuru ụwa ọnụ).

A na-akọ na ndị na-emepụta mgbawa dị ka Hynix na Samsung na-achọ ịgbasa ngwa nke fluorine mix gas (F2 Mix).

Gas ọzọ a na-ejikarị eme ihe bụhydrogen fluoride (HF), nke a na-eji na akụrụngwa etching cryogenic. HF nwere GWP nke 1 ma ọ bụ ihe na-erughị ya, dị ala karịa gas fluorocarbon ejiri n'oge gara aga maka oghere oghere NAND.Ezinụlọ fluorocarbon gas carbon tetrafluoride (CF4)na octafluorocyclobutane (C4F8) nwere GWP nke 6030 na 9540, n'otu n'otu.

Mgbanwe ahụ a kpọtụrụ aha n'elu na ojiji gas na-atụkwa anya na ọ ga-emetụta arụmọrụ nke metụtara yaụlọ ọrụ gas pụrụ iche.