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Tungsten hexafluoride WF6
wehewehe
ʻO ka Tungsten hexafluoride he mea hoʻohuihui ʻole me ke ʻano kemika WF6, he kinoea kala ʻole ma ka lumi wela a me ke kaomi, a hiki ke hoʻoheheʻe ʻia i ka hapa nui o nā mea hoʻoheheʻe organik.
ʻIke huahana
| Hōʻike | 99.999% | ||
| CF4 |
| K | ≤5ppb |
| O2 |
| ʻO Mn | ≤10ppb |
| N2 | ＜1ppm | Ua hala | ≤5ppb |
| CO | ＜0.5ppm | ʻO Th | ≤0.1ppb |
| CO2 | ＜0.5ppm | O | ≤10ppb |
| SiF4 | ＜0.5ppm | ʻO kēlā | ≤10ppb |
| SF6 | ＜0.5ppm | IN | ≤0.05ppb |
| HF | ＜ppm | ʻO Zn | ≤10ppb |
| Ua ʻōlelo ʻo Al | ≤10ppb | A | ≤10ppb |
| E like me | ≤10ppb | ʻO Pb | ≤10ppb |
| B | ≤10ppb | P | ≤2ppb |
| ʻO kēlā | ≤5ppb | ʻO Mg | ≤10ppb |
| Cd | ≤2ppb | In | ≤20ppb |
| Cr | ≤10ppb | Me | ≤5ppb |
| ʻO Fe | ≤10ppb | Mo | ≤10ppb |
| Huina haumia o kekahi metala | ≤500 | ||
Pūʻolo & Hoʻouna
| Huahana | Tungsten hexafluoride WF6 | ||
| Nui pūʻolo | 10Ltr Cylinder | 50Ltr Cylinder | / |
| Hoʻopiha ʻana i ke kaupaona ʻupena/Cyl | 15KGS | 50kgs | |
| QTY Hoʻouka ʻia ma 20'Container | 500Cyls | 200Cyls | |
| Paona Tare Cylinder | 14kgs | 55kgs | |
| Valve | CGA638 | ||
Hoʻohana maʻamau
ʻO Tungsten fluoride (WF6) wale nō ka mea paʻa a hana ʻia i nā ʻano ʻano tungsten fluoride. Hoʻohana nui ʻia ia ma ke ʻano he mea maka no ka tungsten metal chemical vapor deposition (CVD) kaʻina i ka ʻoihana uila, a ʻo ka WSi2 i hana ʻia mai ia mea hiki ke hoʻohana ʻia ma ke ʻano he mea wili i nā kaʻa hoʻohui nui (LSI), a hiki ke hoʻohana ʻia. hoʻohana ʻia ma ke ʻano he mea maka no nā electrodes semiconductor, fluorinating agents, polymerization catalysts a me nā mea optical. Nā noi uila ʻole o WF6: Hiki ke hana paʻakikī ʻo Tungsten e hana i ka carbide tungsten ma ka ʻili o ke kila e ka ʻenehana CVD e hoʻomaikaʻi i nā waiwai o ke kila, a hiki ke hoʻohana ʻia e hana i kekahi mau mea tungsten, e like me nā paipu tungsten a me nā crucibles.